Electrical and Electronic Engineering News
Yuya Yamashita (D1) of Akatsuka Lab won the GEC Student-Poster Prize at the 75th Annual Gaseous Electronics Conference
Yuya Yamashita (D1) of Akatsuka Lab. won the GEC Student-Poster Prize at the 75th Annual Gaseous Electronics Conference held at Sendai International Center from October 3 to 7, 2022.
Yuya Yamashita（Akatsuka Lab. D1）
Award summary
- Award Winner：
- Yuya Yamashita (D1)
- Conferrer：
- The Americal Physical Society (APS)/ Japan Society of Applied Plysics (JSAP)
- Award：
- GEC Student-Poster Prizes
- Title：
- Position dependence diagnosis of electron temperature and density of inductively coupled argon plasma based on Abel inverted optical emission spectroscopic measurement and collisional-radiative model
- Authors：
- Yuya Yamashita1, Kenta Doi2, Tetsuji Kiyota2, Akira Kobayashi1, Sotaro Hosoya1, Kazuma Yoneda1, Atsushi Nezu1, and Hiroshi Akatsuka1
（Affiliations：1Tokyo Institute of Technology, 2ULVAC. Inc.） - Award Date：
- October 6, 2022
From the winner
Yuya Yamashita working on his research
Plasma is applied in a wide range of industrial fields such as semiconductor processing. However, the diagnostic technology to understand the state of plasma has not yet been fully established. At present, this is a barrier to elucidation of fundamental phenomena. For this reason, at industrial factories, operating conditions are designed based on trial and error, which has been an engineering issue.
Akatsuka Laboratory is working on research on plasma diagnostics and plasma spectroscopy. In this research, argon plasma generated by an etching system is examined, and a method for diagnosing electron temperature and density, which are parameters that govern the plasma reaction, was developed based on the plasma emission spectrum. In addition, we examined various problems related to plasma diagnosis in actual machining equipment, which have hardly been examined so far.
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