Electrical and Electronic Engineering News
Yuya Yamashita (D1) of Akatsuka Lab. won the GEC Student-Poster Prize at the 75th Annual Gaseous Electronics Conference held at Sendai International Center from October 3 to 7, 2022.
Plasma is applied in a wide range of industrial fields such as semiconductor processing. However, the diagnostic technology to understand the state of plasma has not yet been fully established. At present, this is a barrier to elucidation of fundamental phenomena. For this reason, at industrial factories, operating conditions are designed based on trial and error, which has been an engineering issue.
Akatsuka Laboratory is working on research on plasma diagnostics and plasma spectroscopy. In this research, argon plasma generated by an etching system is examined, and a method for diagnosing electron temperature and density, which are parameters that govern the plasma reaction, was developed based on the plasma emission spectrum. In addition, we examined various problems related to plasma diagnosis in actual machining equipment, which have hardly been examined so far.